Resonant-bridge two-axis microaccelerometer
- 28 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 342-345
- https://doi.org/10.1016/0924-4247(90)85068-f
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Process Integration for active polysilicon resonant microstructuresSensors and Actuators, 1989
- A thermally-excited silicon accelerometerSensors and Actuators, 1989
- Resonant-microbridge vapor sensorIEEE Transactions on Electron Devices, 1986