The design and operation of monolithic X-ray interferometers for super-precision metrology

Abstract

A review of the techniques of X-ray interferometry relevant to micro-displacement metrology is given, with particular emphasis on its role in calibration. Monolithic interferometer designs are advocated because of their favourable metrology loop structures. New developments are reported of techniques that should widen the range of practical situations to which X-ray interferometric calibrations can be applied. One is the use of image processing directly from an X-ray camera to analyse X-ray moire images. The other uses capacitive sensors and precision elastic drives to effect rapid transfer calibrations.