Calibration of Ellipsometer Divided Circles*
- 1 August 1971
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America
- Vol. 61 (8), 1118
- https://doi.org/10.1364/josa.61.001118
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Unified Analysis of Ellipsometry Errors Due to Imperfect Components, Cell-Window Birefringence, and Incorrect Azimuth Angles*Journal of the Optical Society of America, 1971
- Two Alignment Methods for the Polarizer and Analyzer in an EllipsometerApplied Optics, 1970
- The effects of polarizer ellipticity on ellipsometry measurementsSurface Science, 1970
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963