Observation of dislocations and microplasma sites in semiconductors by direct correlations of STEBIC, STEM and ELS
- 1 March 1980
- journal article
- Published by Wiley in Journal of Microscopy
- Vol. 118 (3), 263-273
- https://doi.org/10.1111/j.1365-2818.1980.tb00273.x
Abstract
No abstract availableKeywords
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