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High rate reactive magnetron sputtered tungsten carbide films
Home
Publications
High rate reactive magnetron sputtered tungsten carbide films
High rate reactive magnetron sputtered tungsten carbide films
PS
P. K. Srivastava
P. K. Srivastava
VV
V. D. Vankar
V. D. Vankar
KC
K. L. Chopra
K. L. Chopra
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1 November 1985
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 3
(6)
,
2129-2134
https://doi.org/10.1116/1.573266
Abstract
No abstract available
Cited by 27 articles