Fracture strain of LPCVD polysilicon
- 6 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988
- Deformation and fracture of small silicon crystalsActa Metallurgica, 1957
- Tensile tests on silicon whiskersActa Metallurgica, 1955