Buried refractive microlenses formed by selective oxidation of AlGaAs
- 1 January 1996
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 32 (15), 1406-1408
- https://doi.org/10.1049/el:19960887
Abstract
The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980 nm, and modelled theoretically.Keywords
This publication has 3 references indexed in Scilit:
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- Hydrolyzation oxidation of AlxGa1−xAs-AlAs-GaAs quantum well heterostructures and superlatticesApplied Physics Letters, 1990