Soft x-ray emission spectrometer for undulator radiation

Abstract
An experimental system for high‐resolution soft x‐ray emission spectroscopy was made. The experimental system is designed to be attached to the undulator beamlines. Spectrometer uses the Rowland circle geometry in which input slit, spherical grating, and multichannel detector lie on the focal circle. Three blazed holographic gratings are changeable in the vacuum. The Rowland circle radii of gratings are 5, 7, and 10 m and their line densities are 600, 1200, and 2400 lines/mm, respectively. The available photon energy is from 30 to 1200 eV. The resolution ΔE is achieved to 0.06 eV by 50 μ‐input‐slit width for hν=120 eV. Several experimental results measured by this system are presented.