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Atom-probe study of the early stage of silicide formation. II. Ni–Si system
Home
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Atom-probe study of the early stage of silicide formation. II. Ni–Si system
Atom-probe study of the early stage of silicide formation. II. Ni–Si system
ON
Osamu Nishikawa
Osamu Nishikawa
EN
Eiichi Nomura
Eiichi Nomura
MW
Minoru Wada
Minoru Wada
YT
Yoshitaka Tsunashima
Yoshitaka Tsunashima
SH
Shiro Horie
Shiro Horie
MS
Mezame Shibata
Mezame Shibata
TY
Toshihiko Yoshimura
Toshihiko Yoshimura
RU
Ryuji Uemori
Ryuji Uemori
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1 January 1983
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 1
(1)
,
10-14
https://doi.org/10.1116/1.582533
Abstract
No abstract available
Cited by 16 articles