Thin palladium silicide contacts to silicon
- 1 January 1981
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 52 (1), 305-310
- https://doi.org/10.1063/1.328494
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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- Formation kinetics and structure of Pd2Si films on SiSolid-State Electronics, 1973
- The growth and transformation of Pd2Si on (111), (110) and (100) SiThin Solid Films, 1973
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- Metallurgical properties and electrical characteristics of palladium silicide-silicon contactsSolid-State Electronics, 1971