Scanning ESCA: A new dimension for electron spectroscopy
- 15 March 1977
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 30 (6), 274-275
- https://doi.org/10.1063/1.89364
Abstract
Experiments have been conducted to determine the feasibility of the theoretical experiment set forth by Cazaux. The experiment consists of electron bombarding a thin foil of aluminum with a thin specimen mounted on the opposite side. A focused scanning electron beam is used to bombard the aluminum substrate to produce a localized source of AlKα x rays. This focused Al x‐ray (hν=1.4 keV) source creates a spatially localized source of photoelectrons in the specimen. The photoelectrons are separated in energy with a cylindrical mirror spectrometer to produce an ESCA spectrum from an area of less than 20 μm in diameter. Two‐dimensional ESCA images have been obtained by this method utilizing intensity variations in the amplitude of a selected photoelectron peak to intensity modulate a cathode ray tube monitor as the electron beam is scanned.Keywords
This publication has 2 references indexed in Scilit:
- Microanalyse et microscopie photoélectroniques X: principe et performances prévisiblesRevue de Physique Appliquée, 1975
- Combined ESCA/Auger system based on the double pass cylindrical mirror analyzer.Journal of Electron Spectroscopy and Related Phenomena, 1974