A search for a thermal spike effect in sputtering
- 1 February 1983
- journal article
- research article
- Published by Springer Nature in Applied Physics A
- Vol. 30 (2), 83-86
- https://doi.org/10.1007/bf00614908
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- A search for a thermal spike effect in sputtering. I. Temperature dependence of the yield at low-kev, heavy-ion bombardmentRadiation Effects, 1982
- High density cascade effectsRadiation Effects, 1981
- Nonlinear sputtering effects in thin metal filmsApplied Physics Letters, 1979
- Spikes in low energy sputtering of silver and goldPhysics Letters A, 1977
- Sputtering-yield studies on silicon and silver targetsRadiation Effects, 1973
- The energy distribution of sputtered atoms from goldRadiation Effects, 1972
- An investigation of thermal spikes by studying the high energy sputtering of metals at elevated temperaturesPhilosophical Magazine, 1965