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Atomic layer epitaxy growth of titanium dioxide thin films from titanium ethoxide
Home
Publications
Atomic layer epitaxy growth of titanium dioxide thin films from titanium ethoxide
Atomic layer epitaxy growth of titanium dioxide thin films from titanium ethoxide
Mikko Ritala
Mikko Ritala
Markku Leskela
Markku Leskela
ER
Eero Rauhala
Eero Rauhala
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1 April 1994
journal article
Published by
American Chemical Society (ACS)
in
Chemistry of Materials
Vol. 6
(4)
,
556-561
https://doi.org/10.1021/cm00040a035
Abstract
No abstract available
Keywords
ATOMIC LAYER EPITAXY
THIN FILM
TITANIUM
Cited by 95 articles