Study of graded aluminium oxide films prepared by metal-organic chemical vapour deposition
- 1 May 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 127 (1-2), 85-92
- https://doi.org/10.1016/0040-6090(85)90214-7
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Deposition and Properties of Aluminum Oxide Obtained by Pyrolytic Decomposition of an Aluminum AlkoxideJournal of the Electrochemical Society, 1967