Few collisions approach for threshold sputtering
- 1 December 1985
- Vol. 35 (12), 561-571
- https://doi.org/10.1016/0042-207x(85)90316-1
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Sputtering studies with the Monte Carlo Program TRIM.SPApplied Physics A, 1984
- A universal relation for the sputtering yield of monatomic solids at normal ion incidenceNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
- Theoretical studies on an empirical formula for sputtering yield at normal incidenceRadiation Effects, 1983
- An analytical formula and important parameters for low-energy ion sputteringJournal of Applied Physics, 1980
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- Sputtering ThresholdsPhysical Review B, 1961
- Theorie der Streuung schneller geladener Teilchen I. Einzelstreuung am abgeschirmten Coulomb-FeldZeitschrift für Naturforschung A, 1947