Dynamics and squeeze film gas damping of a capacitive RF MEMS switch
- 26 October 2004
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (1), 176-184
- https://doi.org/10.1088/0960-1317/15/1/025
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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