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Proximity effect correction for an electron beam direct writing system EX-7
Home
Publications
Proximity effect correction for an electron beam direct writing system EX-7
Proximity effect correction for an electron beam direct writing system EX-7
TA
Takayuki Abe
Takayuki Abe
NI
Naotaka Ikeda
Naotaka Ikeda
HK
Hideo Kusakabe
Hideo Kusakabe
RY
Ryoichi Yoshikawa
Ryoichi Yoshikawa
TT
Tadahiro Takigawa
Tadahiro Takigawa
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1 November 1989
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 7
(6)
,
1524-1527
https://doi.org/10.1116/1.584525
Abstract
No abstract available
Keywords
BEAM DIRECT
SYSTEM EX
DIRECT WRITING
PROXIMITY EFFECT
ELECTRON BEAM
EFFECT CORRECTION
Cited by 8 articles