Effects of Water Vapor and Oxygen Excitation on Oxidation of GaAs, GaP and InSb Surfaces Studied by X-Ray Photoemission Spectroscopy
- 1 August 1979
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 18 (8), 1525-1529
- https://doi.org/10.1143/jjap.18.1525