YBa2Cu3O7−δ films deposited by a novel ion beam sputtering technique

Abstract

Superconducting films of YBa₂Cu₃O_7−δ have been synthesized in a novel ion beam sputter deposition system which features a rotating target holder with BaO₂, CuO, and Y₂O₃ as the sputtering targets. The dwell time of the ion beam on each oxide target is determined by a computer‐controlled feedback loop using the signal from a programmable quartz crystal resonator. The sputtered fluxes of all film components originate from the same spatial location, ensuring homogeneous film composition. The results presented demonstrate for the first time an automated ion beam sputter deposition system with the capability of producing high T_c superconducting films by controlled sputtering of either elemental metallic components or oxide precursors. The concept may be extended to include processes such as patterning, production of layered structures (junctions), and film encapsulation necessary for microcircuit manufacturing based on high T_c superconducting films.