Fully Batch Fabricated Magnetic Microactuators Using A Two Layer Liga Process
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 320-323
- https://doi.org/10.1109/sensor.1995.717183
Abstract
Full batch fabrication and successful testing of electromagnetic linear actuators is demonstrated. The fabrication uses a 5 mask process that combines two deep x-ray lithography layers and 3 optical lithography layers. Material magnetic properties have been investigated and the relative permeability of nickel was found to be 12 while that of nickel/iron permalloy was 400. Design rules are derived for the case of a microrelay where large forces at small gaps are required. Switching of relays was observed at 1.4 A for a relay made out of nickel and at 45 mA for one of permalloy. Particularly for permalloy, the contact forces at 1A are well beyond those of miniaturised relays.Keywords
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