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The construction of small planar magnetrons for sputtering use
Home
Publications
The construction of small planar magnetrons for sputtering use
The construction of small planar magnetrons for sputtering use
CE
C Elphick
C Elphick
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1 January 1981
journal article
Published by
Elsevier
in
Vacuum
Vol. 31
(1)
,
5-7
https://doi.org/10.1016/s0042-207x(81)80089-9
Abstract
No abstract available
Keywords
MAGNETRONS FOR SPUTTERING
PLANAR MAGNETRONS
SMALL PLANAR
SPUTTERING USE
CONSTRUCTION
Cited by 9 articles