A simple technique to deposit molybdenum thin films
- 1 June 1982
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 28 (2), 125-128
- https://doi.org/10.1007/bf00617143
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Optical and structural properties of black molybdenum photothermal converter layers deposited by the pyrolysis of Mo(CO)6Journal of Applied Physics, 1981
- Needle crystals arising from discharge-induced decomposition of hexacarbonyltungsten moleculesJournal of Crystal Growth, 1980
- Cathodic needle growth from Mo(CO)6 and Cr(CO)6 vapors at lower electric fieldsApplied Physics A, 1980
- CVD molybdenum thin films in photothermal solar convertersSolar Energy Materials, 1979
- Plasma-promoted deposition of thin inorganic filmsJournal of Vacuum Science and Technology, 1979
- The Deposition of Molybdenum and Tungsten Films from Vapor Decomposition of CarbonylsJournal of the Electrochemical Society, 1970