Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Spin‐On Glass as an Intermediate Layer in a Tri‐Layer Resist Process
Home
Publications
Spin‐On Glass as an Intermediate Layer in a Tri‐Layer Resist Process
Spin‐On Glass as an Intermediate Layer in a Tri‐Layer Resist Process
GR
Gary W. Ray
Gary W. Ray
SP
Shiesen Peng
Shiesen Peng
DB
Diane Burriesci
Diane Burriesci
MO
Michael M. O'Toole
Michael M. O'Toole
EL
En‐Den Liu
En‐Den Liu
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
1 September 1982
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 129
(9)
,
2152-2154
https://doi.org/10.1149/1.2124398
Abstract
No abstract available
Cited by 18 articles