Investigation of the hydrogen and impurity contents of amorphous silicon by secondary ion mass spectrometry
- 31 December 1980
- journal article
- Published by Elsevier in Solar Cells
- Vol. 2 (4), 365-376
- https://doi.org/10.1016/0379-6787(80)90012-5
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- Evaluation of a cesium positive ion source for secondary ion mass spectrometryAnalytical Chemistry, 1977
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