Optical bends and rings fabricated by preferential etching
- 15 June 1975
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 26 (12), 699-701
- https://doi.org/10.1063/1.88041
Abstract
We have applied the preferential etching technique to the fabrication of optical bends and rings. Nearly perfect smooth waveguide walls formed by crystalline planes can still be obtained in the curved section. Applications of such preferentially etched optical bends and rings in integrated optics are discussed.Keywords
This publication has 8 references indexed in Scilit:
- Analysis of ring distributed-feedback lasersJournal of Applied Physics, 1974
- Fabrication techniques for surface-acoustic-wave and thin-film optical devicesProceedings of the IEEE, 1974
- Electron-Resist Fabrication of Bends and Couplers for Integrated Optical CircuitsApplied Optics, 1973
- Channel optical waveguide directional couplersApplied Physics Letters, 1973
- Unidirectional Thin-Film Ring LaserApplied Physics Letters, 1972
- Mode Conversion Caused by Surface Imperfections of a Dielectric Slab WaveguideBell System Technical Journal, 1969
- Anisotropic Etching of SiliconJournal of Applied Physics, 1969
- Integrated Optics: An IntroductionBell System Technical Journal, 1969