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Hot-jet etching of Pb, GaAs, and Si
Home
Publications
Hot-jet etching of Pb, GaAs, and Si
Hot-jet etching of Pb, GaAs, and Si
MG
M. W. Geis
M. W. Geis
NE
N. N. Efremow
N. N. Efremow
SP
S. W. Pang
S. W. Pang
AA
A. C. Anderson
A. C. Anderson
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1 January 1987
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 5
(1)
,
363-365
https://doi.org/10.1116/1.583903
Abstract
No abstract available
Cited by 18 articles