Plasma‐Polymerized Dry‐Developable Resist for Synchrotron Radiation Lithography

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1 March 1987

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 134 (3), 707-711
https://doi.org/10.1149/1.2100536

Abstract

No abstract available

Keywords

SYNCHROTRON RADIATION

Cited by 11 articles