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Defect Injection and Diffusion in Semiconductors
Home
Publications
Defect Injection and Diffusion in Semiconductors
Defect Injection and Diffusion in Semiconductors
NS
Nicolaas Stolwijk
Nicolaas Stolwijk
HB
Hartmut Bracht
Hartmut Bracht
HH
H.-G. Hettwer
H.-G. Hettwer
WL
Wilfried Lerch
Wilfried Lerch
HM
Helmut Mehrer
Helmut Mehrer
AR
A. Rucki
A. Rucki
WJ
Wolfgang Jäger
Wolfgang Jäger
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1 May 1994
journal article
Published by
Trans Tech Publications, Ltd.
in
Materials Science Forum
Vol. 155-156
,
475-492
https://doi.org/10.4028/www.scientific.net/msf.155-156.475
Abstract
No abstract available
Keywords
DISLOCATION
GALLIUM ARSENIDE
KICK-OUT MECHANISM
NITRIDATION
OXIDATION
PRECIPITATION
SELF-INTERSTITIAL
SILICIDATION
SILICON
STACKING FAULT
VACANCY
VOID
Cited by 6 articles