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Formimg local semi-insulating regions on silicon wafers by proton bombardment
Home
Publications
Formimg local semi-insulating regions on silicon wafers by proton bombardment
Formimg local semi-insulating regions on silicon wafers by proton bombardment
CL
C. Liao
C. Liao
TH
T.-H. Huang
T.-H. Huang
CL
C.-Y. Lee
C.-Y. Lee
DT
D.-L. Tang
D.-L. Tang
SL
S.-M. Lan
S.-M. Lan
TY
T.-N. Yang
T.-N. Yang
LL
L.-F. Lin
L.-F. Lin
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27 November 2002
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
p.
80-81
https://doi.org/10.1109/drc.1998.731130
Abstract
No abstract available
Keywords
PROTON
SILICON
WAFERS
BOMBARDMENT
LOCAL SEMI INSULATING
FORMIMG LOCAL
Cited by 2 articles