Abstract
Experimental cross sections for the electron-attachment processes for SF6/SF6 and Cl/CFCl3 are reported in the energy range 0-200 meV by normalizing each attachment line shape to measurement of a thermal rate coefficient. When the same ion states are detected, good agreement is found between present values, for which a monoenergetic electron source is used, and swarm-unfolded results. The present data constitute a new limit for cross sections reported at high resolution at the lowest electron energy.