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Remarks on the Vacancy Mechanisms in Ion Implantation
Home
Publications
Remarks on the Vacancy Mechanisms in Ion Implantation
Remarks on the Vacancy Mechanisms in Ion Implantation
MK
Masahiro Kurata
Masahiro Kurata
YM
Yasumitsu Morikawa
Yasumitsu Morikawa
KN
Koichi Nagami
Koichi Nagami
HK
Haruo Kuroda
Haruo Kuroda
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1 March 1973
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 12
(3)
,
472-473
https://doi.org/10.1143/jjap.12.472
Abstract
No abstract available
Keywords
ION IMPLANTATION
Cited by 17 articles