MULTILAYER THIN-FILM ANALYSIS BY ION BACKSCATTERING

Abstract

Multilayer polycrystalline Er, Sc, or V layers, 500–20 000 Å thick, on Kovar or sapphire substrates were studied using 2‐MeV He⁺ ion backscattering. Underlying, as well as surface layer, average thicknesses were measured with a sensitivity of 200 Å. In addition, results were obtained on interfacial diffusion, film thickness variations, and the depth distribution of heavy impurities.