GROWTH OF PLASMA-TRANSPORT MICROCRYSTALLINE SILICON AS STUDIED BY IN-SITU RAMAN SPECTROSCOPY
Open Access
- 1 October 1982
- journal article
- Published by EDP Sciences in Le Journal de Physique Colloques
- Vol. 43 (C1), C1-247
- https://doi.org/10.1051/jphyscol:1982134