Metal-Oxide-Metal (M-O-M) Detector
- 1 February 1971
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 42 (2), 554-563
- https://doi.org/10.1063/1.1660062
Abstract
The properties of a metal‐oxide‐metal (M‐O‐M) tunneling detector are presented and the parameters influencing its operation are discussed. The theory of operation and experimental results for small as well as large signals are presented. The polarity reversal at large‐signal levels is predicted theoretically and observed experimentallyKeywords
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