Performance of turbomolecular pumps in an extended TEM specimen chamber equipped for in-situ vapour deposition experiments
- 30 June 1992
- journal article
- Published by Elsevier in Ultramicroscopy
- Vol. 41 (4), 303-316
- https://doi.org/10.1016/0304-3991(92)90210-b
Abstract
No abstract availableKeywords
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