Vacuum microelectronics-1992

Abstract

Vacuum microelectronics is a new interdisciplinary field utilizing the mechanism of electron emission into a vacuum for devices requiring bulk and surface micromachining. By fabricating arrays of conductive or semiconductive structures that are either gated or ungated, a multitude of devices can be formed that utilize cold emission and ballistic transport of electrons from emitting cathodes to appropriate collector electrodes. Potential applications include flat panel vacuum fluorescent displays, ultrahigh-frequency power sources and amplifiers, high-speed logic and signal processing circuits, and sensors. The technology of vacuum microelectronics may be capable of operation within extremely harsh environments in terms of temperature and radiation, assuming the availability of compatible packaging materials. The author summarizes the state of the art for vacuum microelectronics, with special emphasis on operation, device fabrication, testing, experimental results, and potential applications.