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Mechanistic studies of oxygen plasma etching
Home
Publications
Mechanistic studies of oxygen plasma etching
Mechanistic studies of oxygen plasma etching
MH
M. A. Hartney
M. A. Hartney
WG
W. M. Greene
W. M. Greene
DS
D. S. Soane
D. S. Soane
DH
D. W. Hess
D. W. Hess
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1 November 1988
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 6
(6)
,
1892-1895
https://doi.org/10.1116/1.584196
Abstract
No abstract available
Keywords
PLASMA ETCHING
Cited by 18 articles