Preparation of Lead Zirconate Titanate Thin Films by Reactive Evaporation
- 1 September 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (9S), 5287-5290
- https://doi.org/10.1143/jjap.33.5287
Abstract
Lead zirconate titanate thin films have been successfully fabricated by reactive evaporation. Elemental Pb, Zr, and Ti were evaporated in ozone-oxygen mixture ambient. Excellent controls of uniformity of thickness and composition were achieved over a large area (within ±2% on 4-inch wafer). The electrical properties were examined as a function of Pb content in the films. High dielectric constant (ε∼1000) and low leakage current ( 1.7×10-7 A/cm2) were realized for the film with stoichiometric composition.Keywords
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