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simultaneous radio frequency discharge power measurements
Home
Publications
I
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simultaneous radio frequency discharge power measurements
I
n
s
i
t
u
simultaneous radio frequency discharge power measurements
VG
V. A. Godyak
V. A. Godyak
RP
R. B. Piejak
R. B. Piejak
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1 September 1990
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 8
(5)
,
3833-3837
https://doi.org/10.1116/1.576457
Abstract
No abstract available
Keywords
DISCHARGE
SIMULTANEOUS
DISSIPATED
VOLTAGE
FREQUENCY
RADIO
AGREEMENT
ARGON
MHZ
Cited by 119 articles