Frictional Properties of the Micro-Textured Surface of Anisotropically Etched Silicon
- 31 December 2003
- journal article
- Published by Elsevier in CIRP Annals
- Vol. 52 (1), 471-474
- https://doi.org/10.1016/s0007-8506(07)60628-3
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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