An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation
- 1 March 1973
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Biomedical Engineering
- Vol. BME-20 (2), 101-109
- https://doi.org/10.1109/tbme.1973.324170
Abstract
A thin-diaphragm piezoresistive pressure sensor for biomedical instrumentation has been developed using monolithic integratedcircuit (IC) techniques. The piezoresistive effect has been chosen for this device because it provides an observable resistance change that is a linear function of pressure and is observable at low stress levels. A diaphragm is used as a stress magnifying device; its magnification is proportional to the square of the ratio of the diaphragm diameter to its thickness. The pressure-induced stresses in the diaphragm are sensed by properly oriented piezoresistors interconnected to form a bridge.Keywords
This publication has 9 references indexed in Scilit:
- An IC piezoresistive pressure sensor for biomedical instrumentationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1971
- Application of Preferential Electrochemical Etching of Silicon to Semiconductor Device TechnologyJournal of the Electrochemical Society, 1970
- Anisotropic Etching of SiliconJournal of Applied Physics, 1969
- Semiconductor mechanical sensorsIEEE Transactions on Electron Devices, 1969
- Subminiature silicon pressure transducerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1969
- Ethylene Diamine-Catechol-Water Mixture Shows Preferential Etching of p-n JunctionJournal of the Electrochemical Society, 1969
- Measurement of Strains at Si-SiO2 InterfaceJournal of Applied Physics, 1966
- Silicon Diffused-Element Piezoresistive DiaphragmsJournal of Applied Physics, 1962
- Analysis of Bi-Metal ThermostatsJournal of the Optical Society of America, 1925