Backscattering of kilovolt electrons from thin films

Abstract

The angular distributions of electrons backscattered from thin films of Al and Au have been measured in order to illustrate the relative importance of single and multiple scattering and diffusion in the backscattering process. The data obtained tend to support the assumption that the diffusion process is important for backscattering in material with small as well as large Z. Single elastic scattering acts can have little influence at small Z and appear to contribute noticeably only at large Z, contrary to the predictions of a recent simple theoretical model employed by Everhart and Archard.