A study of silicon angular rate sensors using anisotropic etching technology
- 1 May 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 43 (1-3), 72-77
- https://doi.org/10.1016/0924-4247(93)00668-t
Abstract
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- Piezoelectric vibratory gyroscope using flexural vibration of a triangular barPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002