Copolymers of Trimethylsilylstyrene with Chloromethylstyrene for a Bi‐Layer Resist System
- 1 September 1983
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 130 (9), 1962-1964
- https://doi.org/10.1149/1.2120132