Abstract
A classical theory of electron energy loss is used to calculate the breakdown field of quartz as 1.0×107 V/cm. The method makes use of the dielectricdispersion curves to determine the electron energy loss via interaction with the longitudinal optical (LO) phonon modes. The 0.153‐eV LO mode is the dominant mode in determining the breakdown. The results for quartz should also be applicable to amorphous SiO2 since the optical phonon modes are strongly localized and the nearest‐neighbor configuration is maintained for both silica and quartz. The 1.0×107 V/cm breakdown calculation is in excellent agreement with the highest breakdown fields measured for amorphous SiO2 films.

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