Influence of surface films on the development of pits during etching of silicon
- 31 March 1982
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 57 (1), 48-56
- https://doi.org/10.1016/0022-0248(82)90247-0
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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