Rate-equation study of nucleation and growth of thin films. I. Growth of one monolayer
- 1 August 1989
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review A
- Vol. 40 (4), 2088-2095
- https://doi.org/10.1103/physreva.40.2088
Abstract
The kinetics of nucleation and growth of thin films is investigated using phenomenological rate equations modified from the equations by Venables (Ref. 6). These consist of coupled first-order differential equations for single adatom density, stable-cluster density, and the fractional coverage of a layer. The rate of evolution of single adatom density on a substrate is governed by the flux of adatoms, the rates of desorption and adsorption of a single adatom, and incorporation of adatoms with other adatoms or with a stable cluster. This approach serves as a basis for a rate-equation model to describe multilayer growth. The effect of impurities is also discussed.Keywords
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