Effect of patterning on thermal agglomeration of ultrathin silicon-on-insulator layer
- 6 December 2001
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 190 (1-4), 11-15
- https://doi.org/10.1016/s0169-4332(01)00833-9
Abstract
No abstract availableKeywords
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