A bidirectional silicon micropump
- 1 August 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 50 (1-2), 81-86
- https://doi.org/10.1016/0924-4247(96)80088-4
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Static And Dynamic Flow Simulation Of A Koh-etched Micro ValvePublished by Institute of Electrical and Electronics Engineers (IEEE) ,1995
- Simulation of microfluid systemsJournal of Micromechanics and Microengineering, 1994
- A valveless diffuser/nozzle-based fluid pumpSensors and Actuators A: Physical, 1993
- A silicon integrated miniature chemical analysis systemSensors and Actuators B: Chemical, 1992
- Micropump and sample-injector for integrated chemical analyzing systemsSensors and Actuators A: Physical, 1990
- A thermopneumatic micropump based on micro-engineering techniquesSensors and Actuators A: Physical, 1990
- A piezoelectric micropump based on micromachining of siliconSensors and Actuators, 1988