Berechnung von Ladungsverteilungen in Elektronenstrahl-Plasma-Hochladungsionenquellen / Calculation of charge state densities in electron beam multiply charged ion sources

Abstract

Regarding both step by step and direct ionization by electron impact, and including losses from radiative recombination and charge exchange, a simple model for calculation of charge state densities in electron beam multiply charged ion sources has been developed. The diffusion of the created charged particles out of the ionization volume is included in the model. A monoenergetic electron beam of high current density interacts with a gas at a pressure range from 10^-6 to 10^-4 Torr. The calculations were performed for Argon, Krypton and Xenon with an impact energy from 2 keV to 10 keV. Influences of several elementary processes were discussed in regard to developments of new types of multiply charged ion sources.